Temperature-dependent optical properties of low-loss plasmonic SrMoO3 thin films

SrMoO3 (SMO) thin films are deposited on LaAlO3 substrates by magnetron sputtering. The effects of ambient temperature the structural, electrical, and optical properties investigated. As increases from 23°C to 800°C, SMO film exhibits high crystallinity low electrical resistivity, real part dielectric functions becomes less negative in visible near-IR wavelength range, epsilon near zero (ENZ) 460 nm 890 nm. loss is significantly lower than that Au, its plasmonic performance comparable or even higher TiN range 600°C. These studies critical for design high-temperature SMO-based devices.